| Place of Origin: | China |
|---|---|
| Brand Name: | Newradar Gas |
| Certification: | ISO9001 |
| Model Number: | NO |
| Minimum Order Quantity: | 50KGS |
| Price: | negotiation |
| Packaging Details: | 30lb - 926L Cylinder package |
| Delivery Time: | 10-20 DAYS |
| Payment Terms: | Western Union, L/C, T/T |
| Supply Ability: | 60TON |
| Brand Name:: | Accept OEM, CUSTOMER BRAND | Other Names:: | HFB |
|---|---|---|---|
| Hazard Class: | 2.3 | Place Of Origin:: | Wuhan |
| Purity:: | 99.95% | Application:: | Semi Industry |
| Package:: | Drum And Cylinder | Cylinders Volume:: | 30lb,50lb, 40L And 926L Cylinder |
| High Light: | electric gas,purity plus specialty gases |
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C4F6 purity 99.95% Etching Gas for Semiconductor Processing
Description:
hexafluoro-1,3-butadiene (C4F6) dry etching gas it has developed in Russia. C4F6 enables dry etching at a line width of as narrow as 90 nm or less. It is therefore indispensable for processing system LSIs and high-speed, large-capacity memory devices that are increasingly used in digital electric appliances and liquid crystal displays.
Fluorocarbon gases are widely used for processing silicon oxide film. Compared with octafluorocyclobutane (C4F8) currently used for processing at the line width of 130 nm, C4F6 has the following advantages:
STANDARD PACKAGE INFORMATION—ASIA AND NORTH AMERICA
| Container Size | 44L Steel | 8L Steel |
| Fill Weights(kgs) | 45 | 5 |
| Valve ConnecƟon | PneumaƟc DISS 724 | Manual DISS 724 |
| Cylinder Dimensions(in) | 9x51 | 7x19 |
Applications:
1. It can use in fluorine-based etching.
2. It also can use in cleaning gases,
3. C4F6 can use as organometallic film forming gases,
